.高純電子級(jí)六氯乙硅烷是一種性能穩(wěn)定、揮發(fā)性低的濕度敏感性的特種氣體，在半導(dǎo)體行業(yè)有著較為廣泛的應(yīng)用。高純電子級(jí)六氯乙硅烷的主要用于氧化硅膜、氮化硅膜等薄膜的制備，與傳統(tǒng)的化學(xué)氣相沉積法制備氧化硅膜、氮化硅膜相比，采用六氯乙硅烷制備的過(guò)程具有沉積溫度低、沉積壓力低、生產(chǎn)效率高的優(yōu)點(diǎn)，且得到的氧化硅膜和氮化硅膜的密度、絕緣性、抗腐蝕性、兼容性都更好。

　　浩瀚色譜（山東）應(yīng)用技術(shù)開(kāi)發(fā)有限公司，研發(fā)氣相色譜法測(cè)定電子特氣 六氯乙硅烷的含量，面積歸一法定量，結(jié)果滿意。

　　名稱(chēng):DC-550不銹鋼填充柱

　　規(guī)格:3m*Φ3

　　*高使用溫度:240°C

　　貨號(hào):20231119001

　　應(yīng)用:YS/T 1434-2021六氯乙硅烷組分含量的測(cè)定 氣相色譜法

　　GB/T 42720-2023電子特氣 六氯乙硅烷

　　High purity electronic grade hexachloroethane is a special gas with stable performance, low volatility, and humidity sensitivity, which has a wide range of applications in the semiconductor industry. High purity electronic grade hexachloroethane is mainly used for the preparation of thin films such as silicon oxide films and silicon nitride films. Compared with traditional chemical vapor deposition methods for preparing silicon oxide films and silicon nitride films, the process of preparing hexachloroethane has the advantages of low deposition temperature, low deposition pressure, and high production efficiency. Moreover, the density, insulation, corrosion resistance, and compatibility of the obtained silicon oxide and silicon nitride films are better.

　　Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a gas chromatography method to determine the content of electronic special gas hexachloroethane, and the area normalization method has been used for quantification, with satisfactory results.

　　Name: DC-550 stainless steel filled column

　　Specification: 3m* Φ three

　　*High operating temperature: 240 ° C

　　Article number: 20231119001

　　Application: YS/T 1434-2021 Determination of Hexachloroethane Component Content Gas Chromatography

　　GB/T 42720-2023 Electronic Special Gas Hexachloroethane